Inventor
KONG WOON
KR9 patents
Patents
9 patentsUS11901214B2Feb 13, 2024
Wafer processing apparatus and method of controlling the same
ZEUS CO LTD2 citations69
US12568799B2Mar 3, 2026
Wafer processing apparatus and wafer processing method
ZEUS CO LTD0 citations60
US12293938B2May 6, 2025
Wafer processing apparatus and wafer processing method
ZEUS CO LTD0 citations60
US12140505B2Nov 12, 2024
Wafer processing apparatus and control method thereof
ZEUS CO LTD0 citations60
US11901212B2Feb 13, 2024
Wafer processing apparatus and wafer processing method
ZEUS CO LTD0 citations60
US12074054B2Aug 27, 2024
Wafer processing apparatus and wafer processing method
ZEUS CO LTD0 citations59
US11749557B2Sep 5, 2023
Wafer processing apparatus
ZEUS CO LTD0 citations59
US12322607B2Jun 3, 2025
Wafer processing apparatus and wafer processing method
ZEUS CO LTD0 citations55
US12544806B2Feb 10, 2026
Wafer cleaning apparatus
ZEUS CO LTD0 citations45