Inventor
MCINTYRE PAUL C
US8 patents
⚠️ This page may combine multiple inventors who share the name “MCINTYRE PAUL C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS7517818B2Apr 14, 2009
Method for forming a nitrided germanium-containing layer using plasma processing
TOKYO ELECTRON LTD3 citations61
US7517812B2Apr 14, 2009
Method and system for forming a nitrided germanium-containing layer using plasma processing
TOKYO ELECTRON LTD0 citations50
US9343291B2May 17, 2016
Method for forming an interfacial layer on a semiconductor using hydrogen plasma
TOKYO ELECTRON LTD0 citations40