Inventor
YEO SANGCHUL
KR4 patents
Patents
4 patentsUS12572129B2Mar 10, 2026
Lithography model generating method based on deep learning, and mask manufacturing method including the lithography model generating method
SAMSUNG ELECTRONICS CO LTD0 citations58
US12561958B2Feb 24, 2026
Method of training semiconductor process image generator
SAMSUNG ELECTRONICS CO LTD0 citations58
US12299869B2May 13, 2025
Computing device for predicting a profile using deep learning and operating method thereof
SAMSUNG ELECTRONICS CO LTD0 citations58
US11169437B2Nov 9, 2021
Optical proximity correction (OPC) methods and methods of manufacturing masks using the OPC methods
SAMSUNG ELECTRONICS CO LTD1 citations53