Inventor
CHANG TAI-HON PHILIP
11 patents
⚠️ This page may combine multiple inventors who share the name “CHANG TAI-HON PHILIP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ETEC SYSTEMS INC
4 patentsUS6281508B1Aug 28, 2001
Precision alignment and assembly of microlenses and microcolumns
ETEC SYSTEMS INC53 citations95
US6220914B1Apr 24, 2001
Method of forming gated photocathode for controlled single and multiple electron beam emission
ETEC SYSTEMS INC42 citations92
US6195214B1Feb 27, 2001
Microcolumn assembly using laser spot welding
ETEC SYSTEMS INC32 citations89
US6008060ADec 28, 1999
Detecting registration marks with a low energy electron beam
ETEC SYSTEMS INC18 citations87
APPLIED MATERIALS INC
4 patentsUS6555830B1Apr 29, 2003
Suppression of emission noise for microcolumn applications in electron beam inspection
APPLIED MATERIALS INC30 citations92
US6376985B2Apr 23, 2002
Gated photocathode for controlled single and multiple electron beam emission
APPLIED MATERIALS INC25 citations92
US6376984B1Apr 23, 2002
Patterned heat conducting photocathode for electron beam source
APPLIED MATERIALS INC19 citations92
US6717146B2Apr 6, 2004
Tandem microchannel plate and solid state electron detector
APPLIED MATERIALS INC11 citations70