Inventor
MCNEILLY MICHAEL A
10 patents
⚠️ This page may combine multiple inventors who share the name “MCNEILLY MICHAEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANTAGE PROD TECH
4 patentsUS4778559AOct 18, 1988
Semiconductor substrate heater and reactor process and apparatus
ADVANTAGE PROD TECH96 citations95
US5044314ASep 3, 1991
Semiconductor wafer processing apparatus
ADVANTAGE PROD TECH47 citations91
US4891335AJan 2, 1990
Semiconductor substrate heater and reactor process and apparatus
ADVANTAGE PROD TECH19 citations81
US4956046ASep 11, 1990
Semiconductor substrate treating method
ADVANTAGE PROD TECH6 citations61
APPLIED MATERIALS INC
3 patentsUS4496609AJan 29, 1985
Chemical vapor deposition coating process employing radiant heat and a susceptor
APPLIED MATERIALS INC98 citations94
US4047496ASep 13, 1977
Epitaxial radiation heated reactor
APPLIED MATERIALS INC120 citations94
US4081313AMar 28, 1978
Process for preparing semiconductor wafers with substantially no crystallographic slip
APPLIED MATERIALS INC142 citations92