Inventor
BENZING WALTER C
4 patents
Patents
4 patentsUS4579080AApr 1, 1986
Induction heated reactor system for chemical vapor deposition
APPLIED MATERIALS INC579 citations97
US4496609AJan 29, 1985
Chemical vapor deposition coating process employing radiant heat and a susceptor
APPLIED MATERIALS INC98 citations94
US4047496ASep 13, 1977
Epitaxial radiation heated reactor
APPLIED MATERIALS INC120 citations94
US4081313AMar 28, 1978
Process for preparing semiconductor wafers with substantially no crystallographic slip
APPLIED MATERIALS INC142 citations92