Inventor
CESNA JOSEPH V
20 patents
⚠️ This page may combine multiple inventors who share the name “CESNA JOSEPH V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SPEEDFAM CORP
14 patentsUS5486131AJan 23, 1996
Device for conditioning polishing pads
SPEEDFAM CORP212 citations98
US4519168AMay 28, 1985
Liquid waxless fixturing of microsize wafers
SPEEDFAM CORP80 citations96
US5993293ANov 30, 1999
Method and apparatus for improved semiconductor wafer polishing
SPEEDFAM CORP24 citations92
US5972162AOct 26, 1999
Wafer polishing with improved end point detection
SPEEDFAM CORP41 citations92
US5868605AFeb 9, 1999
In-situ polishing pad flatness control
SPEEDFAM CORP53 citations92
US5224304AJul 6, 1993
Automated free abrasive machine for one side piece part machining
SPEEDFAM CORP27 citations92
US4270314AJun 2, 1981
Bearing mount for lapping machine pressure plate
SPEEDFAM CORP43 citations92
US5791975AAug 11, 1998
Backing pad
SPEEDFAM CORP46 citations91
US5803798ASep 8, 1998
Dual column abrading machine
SPEEDFAM CORP17 citations90
US5782678AJul 21, 1998
Dual column abrading machine
SPEEDFAM CORP23 citations90
US5595529AJan 21, 1997
Dual column abrading machine
SPEEDFAM CORP36 citations90
US4693012ASep 15, 1987
Measuring bar for free abrasive machines
SPEEDFAM CORP21 citations82
US4593716AJun 10, 1986
Control valve assembly for abrasive slurry
SPEEDFAM CORP18 citations74
US5791978AAug 11, 1998
Bearing assembly for wafer planarization carrier
SPEEDFAM CORP12 citations71
SPEEDFAM IPEC CORP
4 patentsUS6168683B1Jan 2, 2001
Apparatus and method for the face-up surface treatment of wafers
SPEEDFAM IPEC CORP21 citations92
US6142857ANov 7, 2000
Wafer polishing with improved backing arrangement
SPEEDFAM IPEC CORP23 citations92
US6089961AJul 18, 2000
Wafer polishing carrier and ring extension therefor
SPEEDFAM IPEC CORP48 citations92
US5951370ASep 14, 1999
Method and apparatus for monitoring and controlling the flatness of a polishing pad
SPEEDFAM IPEC CORP33 citations92