Inventor
HENDRICKS CHARLES J
9 patents
Patents
9 patentsUS4534816AAug 13, 1985
Single wafer plasma etch reactor
IBM458 citations96
US4600464AJul 15, 1986
Plasma etching reactor with reduced plasma potential
IBM121 citations94
US4340461AJul 20, 1982
Modified RIE chamber for uniform silicon etching
IBM30 citations91
US6281692B1Aug 28, 2001
Interposer for maintaining temporary contact between a substrate and a test bed
IBM15 citations82
US6235544B1May 22, 2001
Seed metal delete process for thin film repair solutions using direct UV laser
IBM19 citations82
US6054863AApr 25, 2000
System for testing circuit board integrity
IBM15 citations69
US6753688B2Jun 22, 2004
Interconnect package cluster probe short removal apparatus and method
IBM3 citations56
US7808257B2Oct 5, 2010
Ionization test for electrical verification
IBM0 citations46
US6984997B2Jan 10, 2006
Method and system for testing multi-chip integrated circuit modules
IBM0 citations36