Inventor
SHODA MIKIO
JP3 patents
Patents
3 patentsUS5209180AMay 11, 1993
Spin coating apparatus with an upper spin plate cleaning nozzle
DAINIPPON SCREEN MFG85 citations94
US4457419AJul 3, 1984
Conveying/positioning apparatus for sheet material
DAINIPPON SCREEN MFG68 citations93
US4588185AMay 13, 1986
Transfer device of sheet object
DAINIPPON SCREEN MFG8 citations72