Inventor

JONES JR ALLEN H

US4 patents

⚠️ This page may combine multiple inventors who share the name “JONES JR ALLEN H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ATHENS CORP

2 patents

US5164049ANov 17, 1992

Method for making ultrapure sulfuric acid

ATHENS CORP59 citations94

US4828660AMay 9, 1989

Method and apparatus for the continuous on-site chemical reprocessing of ultrapure liquids

ATHENS CORP53 citations91

AIR LIQUIDE AMERICAN

1 patent

US6050283AApr 18, 2000

System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing

AIR LIQUIDE AMERICAN100 citations96

ATHENS INC

1 patent

US4855023AAug 8, 1989

Method and apparatus for the continuous on-site chemical reprocessing of ultrapure liquids used in semiconductor wafer cleaning

ATHENS INC45 citations88