P

Inventor

YUAN WALLACE I

US10 patents
⚠️ This page may combine multiple inventors who share the name “YUAN WALLACE I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ATHENS CORP

7 patents
US5354428AOct 11, 1994

Apparatus for the continuous on-site chemical reprocessing of ultrapure liquids

ATHENS CORP62 citations94
US5164049ANov 17, 1992

Method for making ultrapure sulfuric acid

ATHENS CORP59 citations94
US5500096AMar 19, 1996

Method of concentrating less volatile liquids

ATHENS CORP36 citations91
US5236555AAug 17, 1993

Apparatus for concentration of liquids

ATHENS CORP23 citations91
US4828660AMay 9, 1989

Method and apparatus for the continuous on-site chemical reprocessing of ultrapure liquids

ATHENS CORP53 citations91
US5225048AJul 6, 1993

Method for concentration of liquids

ATHENS CORP12 citations72
US5443695AAug 22, 1995

Distillation apparatus for concentrating less volatile liquids

ATHENS CORP5 citations61

ATHENS INC

1 patent
US4855023AAug 8, 1989

Method and apparatus for the continuous on-site chemical reprocessing of ultrapure liquids used in semiconductor wafer cleaning

ATHENS INC45 citations88

AIR LIQUIDE AMERICAN

1 patent
US6372022B1Apr 16, 2002

Ionic purifier

AIR LIQUIDE AMERICAN11 citations73

AIR LIQUIDE ELECTRONICS CHEMIC

1 patent
US6214173B1Apr 10, 2001

On-site manufacture of ultra-high-purity nitric acid

AIR LIQUIDE ELECTRONICS CHEMIC12 citations72