Inventor
IWABUCHI KATSUHIKO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “IWABUCHI KATSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS5462397AOct 31, 1995
Processing apparatus
TOKYO ELECTRON LTD149 citations97
US5407350AApr 18, 1995
Heat-treatment apparatus
TOKYO ELECTRON LTD46 citations92
US6432208B1Aug 13, 2002
Plasma processing apparatus
TOKYO ELECTRON LTD42 citations91
US5697749ADec 16, 1997
Wafer processing apparatus
TOKYO ELECTRON LTD92 citations91
US7624772B2Dec 1, 2009
Load lock apparatus, processing system and substrate processing method
TOKYO ELECTRON LTD13 citations83
US6022418AFeb 8, 2000
Vacuum processing method
TOKYO ELECTRON LTD15 citations73
US7780391B2Aug 24, 2010
Substrate processing device
TOKYO ELECTRON LTD3 citations62
US10600621B2Mar 24, 2020
Plasma electrode and plasma processing device
TOKYO ELECTRON LTD1 citations58