Inventor

YOKOKAWA OSAMU

JP5 patents

⚠️ This page may combine multiple inventors who share the name “YOKOKAWA OSAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEL SAGAMI LTD

2 patents

US5016567AMay 21, 1991

Apparatus for treatment using gas

TEL SAGAMI LTD29 citations91

US5271732ADec 21, 1993

Heat-treating apparatus

TEL SAGAMI LTD24 citations90

TOKYO ELECTRON LTD

2 patents

US5422081AJun 6, 1995

Trap device for vapor phase reaction apparatus

TOKYO ELECTRON LTD41 citations89

US5506389AApr 9, 1996

Thermal processing furnace and fabrication method thereof

TOKYO ELECTRON LTD31 citations87

TOKYO ELECTION SAGAMI KABUSHIK

1 patent

US5328360AJul 12, 1994

Heat-treating apparatus

TOKYO ELECTION SAGAMI KABUSHIK292 citations94