Inventor
TAKANABE EIICHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “TAKANABE EIICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS5775889AJul 7, 1998
Heat treatment process for preventing slips in semiconductor wafers
TOKYO ELECTRON LTD395 citations98
US6402848B1Jun 11, 2002
Single-substrate-treating apparatus for semiconductor processing system
TOKYO ELECTRON LTD48 citations92
US5688116ANov 18, 1997
Heat treatment process
TOKYO ELECTRON LTD17 citations73
TEL SAGAMI LTD
3 patentsUS5277579AJan 11, 1994
Wafers transferring method in vertical type heat treatment apparatus and the vertical type heat treatment apparatus provided with a wafers transferring system
TEL SAGAMI LTD71 citations94
US5016567AMay 21, 1991
Apparatus for treatment using gas
TEL SAGAMI LTD29 citations91
US5030056AJul 9, 1991
Substrate transfer device
TEL SAGAMI LTD20 citations82