Inventor
YORITOMI YOSHIFUMI
JP5 patents
Patents
5 patentsUS5493129AFeb 20, 1996
Thin film transistor structure having increased on-current
HITACHI LTD59 citations95
US5981973ANov 9, 1999
Thin film transistor structure having increased on-current
HITACHI LTD25 citations92
US5821565AOct 13, 1998
Thin film transistor structure having increased on-current
HITACHI LTD22 citations92
US4902394AFeb 20, 1990
Sputtering method and apparatus
HITACHI LTD49 citations92
US5157470AOct 20, 1992
Thin film transistor, manufacturing method thereof and matrix circuit board and image display device each using the same
HITACHI LTD53 citations91