Inventor
OLSEN CHRISTOPHER K
US9 patents
⚠️ This page may combine multiple inventors who share the name “OLSEN CHRISTOPHER K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEL EPION INC
3 patentsUS9324567B2Apr 26, 2016
Gas cluster ion beam etching process for etching Si-containing, Ge-containing, and metal-containing materials
TEL EPION INC1 citations51
US8722542B2May 13, 2014
Gas cluster ion beam process for opening conformal layer in a high aspect ratio contact via
TEL EPION INC1 citations51
US9540725B2Jan 10, 2017
Method and apparatus for beam deflection in a gas cluster ion beam system
TEL EPION INC1 citations48