Inventor
HIRAE SADAO
JP19 patents
Patents
19 patentsUS6729561B2May 4, 2004
Cleaning nozzle and substrate cleaning apparatus
DAINIPPON SCREEN MFG93 citations98
US7479205B2Jan 20, 2009
Substrate processing apparatus
DAINIPPON SCREEN MFG23 citations92
US6951221B2Oct 4, 2005
Substrate processing apparatus
DAINIPPON SCREEN MFG22 citations92
US6901938B2Jun 7, 2005
Substrate cleaning apparatus
DAINIPPON SCREEN MFG27 citations92
US6705331B2Mar 16, 2004
Substrate cleaning apparatus
DAINIPPON SCREEN MFG29 citations92
US6598805B2Jul 29, 2003
Substrate cleaning apparatus
DAINIPPON SCREEN MFG33 citations92
US5857474AJan 12, 1999
Method of and apparatus for washing a substrate
DAINIPPON SCREEN MFG45 citations92
US5314831AMay 24, 1994
Method of and apparatus for evaluating crystal rate in silicon thin film
DAINIPPON SCREEN MFG35 citations92
US5568252AOct 22, 1996
Method and apparatus for measuring insulation film thickness of semiconductor wafer
DAINIPPON SCREEN MFG30 citations91
US5475319ADec 12, 1995
Method of measuring electric charge of semiconductor wafer
DAINIPPON SCREEN MFG20 citations91
US5239183AAug 24, 1993
Optical gap measuring device using frustrated internal reflection
DAINIPPON SCREEN MFG28 citations91
US5225690AJul 6, 1993
Gap measuring device and method using frustrated internal reflection
DAINIPPON SCREEN MFG25 citations91
US7267130B2Sep 11, 2007
Substrate processing apparatus
DAINIPPON SCREEN MFG7 citations73
US5554939ASep 10, 1996
Non-destructive measuring sensor for semiconductor wafer and method of manufacturing the same
DAINIPPON SCREEN MFG14 citations73
US5444389AAug 22, 1995
Method and apparatus for measuring lifetime of minority carriers in semiconductor
DAINIPPON SCREEN MFG9 citations73
US7600522B2Oct 13, 2009
Substrate treatment method and substrate treatment apparatus
DAINIPPON SCREEN MFG2 citations63
US6278267B1Aug 21, 2001
Method of determining impurity content and apparatus for the same
DAINIPPON SCREEN MFG3 citations62
US5504437AApr 2, 1996
Apparatus and method for electrical measurement of semiconductor wafers
DAINIPPON SCREEN MFG2 citations62
US7428907B2Sep 30, 2008
Substrate processing apparatus
DAINIPPON SCREEN MFG1 citations51