Inventor
LEE HIDEKI
JP9 patents
Patents
9 patentsUS5785796AJul 28, 1998
Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus
TOKYO ELECTRON LTD175 citations98
US5647945AJul 15, 1997
Vacuum processing apparatus
TOKYO ELECTRON LTD308 citations98
US5637153AJun 10, 1997
Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus
TOKYO ELECTRON LTD351 citations98
US5616208AApr 1, 1997
Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus
TOKYO ELECTRON LTD239 citations98
US5951772ASep 14, 1999
Vacuum processing apparatus
TOKYO ELECTRON LTD104 citations97
US5380370AJan 10, 1995
Method of cleaning reaction tube
TOKYO ELECTRON LTD56 citations96
US5525160AJun 11, 1996
Film deposition processing device having transparent support and transfer pins
TOKYO ELECTRON LTD78 citations95
US5711815AJan 27, 1998
Film forming apparatus and film forming method
TOKYO ELECTRON LTD28 citations92
US5180692AJan 19, 1993
Method for the manufacture of boron-containing films by CVD or epitaxial techniques using boron trifluoride
TOKYO ELECTRON LTD12 citations71