Inventor
KANDA TSUNEO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “KANDA TSUNEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
5 patentsUS5140366AAug 18, 1992
Exposure apparatus with a function for controlling alignment by use of latent images
CANON KK59 citations95
US5793471AAug 11, 1998
Projection exposure method and apparatus in which scanning exposure is performed in accordance with a shot layout of mask patterns
CANON KK35 citations92
US5808724ASep 15, 1998
Illumination method and system having a first optical element at a position optically conjugate with an object and a second optical element closer to the object and on a pupil plane of the system
CANON KK23 citations91
US6233042B1May 15, 2001
Projection exposure apparatus and device manufacturing method using the same
CANON KK13 citations71
US6867845B2Mar 15, 2005
Mask and projection exposure apparatus
CANON KK4 citations60