Inventor
KAWAHARA TAKAMITSU
JP16 patents
⚠️ This page may combine multiple inventors who share the name “KAWAHARA TAKAMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HOYA CORP
12 patentsUS6736894B2May 18, 2004
Method of manufacturing compound single crystal
HOYA CORP29 citations92
US6703288B2Mar 9, 2004
Compound crystal and method of manufacturing same
HOYA CORP29 citations92
US6416578B1Jul 9, 2002
Silicon carbide film and method for manufacturing the same
HOYA CORP31 citations90
US6128363AOct 3, 2000
X-ray mask blank, x-ray mask, and pattern transfer method
HOYA CORP17 citations84
US6596080B2Jul 22, 2003
Silicon carbide and method for producing the same
HOYA CORP14 citations83
US6475456B2Nov 5, 2002
Silicon carbide film and method for manufacturing the same
HOYA CORP14 citations82
US7101774B2Sep 5, 2006
Method of manufacturing compound single crystal
HOYA CORP8 citations73
US6821340B2Nov 23, 2004
Method of manufacturing silicon carbide, silicon carbide, composite material, and semiconductor element
HOYA CORP12 citations73
US7211337B2May 1, 2007
Compound crystal and method of manufacturing same
HOYA CORP2 citations62
US6317480B1Nov 13, 2001
Method of manufacturing X-ray mask and X-ray mask blank, and X-ray mask and X-ray mask blank manufactured thereby
HOYA CORP3 citations62
US5999590ADec 7, 1999
X-ray mask blank and manufacturing method for the same, and manufacturing method for X-ray mask
HOYA CORP5 citations62
US5848120ADec 8, 1998
X-ray mask blank, X-ray mask and pattern transfer method
HOYA CORP4 citations62