P

Inventor

SHO KOUTAROU

JP6 patents
⚠️ This page may combine multiple inventors who share the name “SHO KOUTAROU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

3 patents
US6162745ADec 19, 2000

Film forming method

TOSHIBA KK38 citations91
US7662542B2Feb 16, 2010

Pattern forming method and semiconductor device manufacturing method

TOSHIBA KK4 citations61
US7683291B2Mar 23, 2010

Substrate processing method and manufacturing method of semiconductor device

TOSHIBA KK0 citations51

TOSHIBA MEMORY CORP

2 patents
US10068915B2Sep 4, 2018

Manufacturing method for a semiconductor device including resist films different in thickness

TOSHIBA MEMORY CORP0 citations51
US9972547B2May 15, 2018

Measurement method, manufacturing method of device, and measurement system

TOSHIBA MEMORY CORP0 citations37

KOBAYASHI KATSUTOSHI

1 patent
US8119313B2Feb 21, 2012

Method for manufacturing semiconductor device

KOBAYASHI KATSUTOSHI2 citations55