Inventor
NAITO YOSHIHIKO
JP22 patents
⚠️ This page may combine multiple inventors who share the name “NAITO YOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
9 patentsUS6329769B1Dec 11, 2001
Electron beam irradiation device
EBARA CORP18 citations83
US10157722B2Dec 18, 2018
Inspection device
EBARA CORP3 citations73
US9966227B2May 8, 2018
Specimen observation method and device using secondary emission electron and mirror electron detection
EBARA CORP5 citations73
US6614037B2Sep 2, 2003
Electron beam irradiating apparatus
EBARA CORP8 citations73
US7952071B2May 31, 2011
Apparatus and method for inspecting sample surface
EBARA CORP3 citations63
US7829853B2Nov 9, 2010
Sample surface observation method
EBARA CORP3 citations63
US5565680AOct 15, 1996
High frequency mass spectrometer
EBARA CORP5 citations60
US9105444B2Aug 11, 2015
Electro-optical inspection apparatus and method with dust or particle collection function
EBARA CORP0 citations51
US5721428AFeb 24, 1998
Magnetic field type mass spectrometer
EBARA CORP1 citations50