Inventor
LEE KANG-SUK
KR7 patents
⚠️ This page may combine multiple inventors who share the name “LEE KANG-SUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
4 patentsUS12040216B2Jul 16, 2024
Substrate supporting member, substrate treating apparatus including the same and substrate treating method thereof
SEMES CO LTD0 citations57
US12440861B2Oct 14, 2025
Chemical liquid supply unit, substrate processing apparatus having the same, and chemical liquid supply method
SEMES CO LTD0 citations45
US11772115B2Oct 3, 2023
Substrate treating apparatus and treatment liquid dispensing method for controlling a temperature of treatment liquid
SEMES CO LTD0 citations45
US10460923B2Oct 29, 2019
Apparatus and method for treating substrate
SEMES CO LTD0 citations39