Inventor
CHENG KUN-PI
TW9 patents
Patents
9 patentsUS6357131B1Mar 19, 2002
Overlay reliability monitor
TAIWAN SEMICONDUCTOR MFG21 citations89
US6507394B1Jan 14, 2003
Method and apparatus for inspecting the surface of a semiconductor device
TAIWAN SEMICONDUCTOR MFG15 citations81
US5843600ADec 1, 1998
Use of sub divided pattern for alignment mark recovery after inter-level dielectric planarization
TAIWAN SEMICONDUCTOR MFG7 citations71
US6396567B1May 28, 2002
Method and apparatus for controlling the dose of radiations applied to a semiconductor wafer during photolithography
TAIWAN SEMICONDUCTOR MFG10 citations70
US6735485B1May 11, 2004
Overlay registration correction method for multiple product type microelectronic fabrication foundry facility
TAIWAN SEMICONDUCTOR MFG2 citations60
US7172948B2Feb 6, 2007
Method to avoid a laser marked area step height
TAIWAN SEMICONDUCTOR MFG5 citations59
US7031794B2Apr 18, 2006
Smart overlay control
TAIWAN SEMICONDUCTOR MFG6 citations58
US6978191B2Dec 20, 2005
Overlay registration control system and method employing multiple pilot lot in-line overlay registration measurement
TAIWAN SEMICONDUCTOR MFG2 citations54
US5902707AMay 11, 1999
Mask containing alignment mark protection pattern
TAIWAN SEMICONDUCTOR MFG1 citations50