Inventor
CHAN CHENG HSUN
TW5 patents
⚠️ This page may combine multiple inventors who share the name “CHAN CHENG HSUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
3 patentsUS7335088B1Feb 26, 2008
CMP system with temperature-controlled polishing head
TAIWAN SEMICONDUCTOR MFG23 citations88
US7416648B2Aug 26, 2008
Image sensor system for monitoring condition of electrode for electrochemical process tools
TAIWAN SEMICONDUCTOR MFG4 citations61
US7966968B2Jun 28, 2011
Electroless plating apparatus with non-liquid heating source
TAIWAN SEMICONDUCTOR MFG0 citations50