Inventor
SILVETTI MARIO DAVID
US12 patents
Patents
12 patentsUS7024105B2Apr 4, 2006
Substrate heater assembly
APPLIED MATERIALS INC56 citations94
US7374393B2May 20, 2008
Method of retaining a substrate during a substrate transferring process
APPLIED MATERIALS INC17 citations92
US7695232B2Apr 13, 2010
Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
APPLIED MATERIALS INC17 citations90
US7107125B2Sep 12, 2006
Method and apparatus for monitoring the position of a semiconductor processing robot
APPLIED MATERIALS INC19 citations90
US7582167B2Sep 1, 2009
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
APPLIED MATERIALS INC15 citations83
US7374391B2May 20, 2008
Substrate gripper for a substrate handling robot
APPLIED MATERIALS INC9 citations83
US11173579B2Nov 16, 2021
Inner retaining ring and outer retaining ring for carrier head
APPLIED MATERIALS INC1 citations72
US7279049B2Oct 9, 2007
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
APPLIED MATERIALS INC7 citations72
US9812344B2Nov 7, 2017
Wafer processing system with chuck assembly maintenance module
APPLIED MATERIALS INC3 citations69
US6911403B2Jun 28, 2005
Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics
APPLIED MATERIALS INC5 citations63
US7094313B2Aug 22, 2006
Universal mid-frequency matching network
APPLIED MATERIALS INC3 citations62
US7997851B2Aug 16, 2011
Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
APPLIED MATERIALS INC5 citations60