Inventor
LAHIRI INDRAJIT
US7 patents
⚠️ This page may combine multiple inventors who share the name “LAHIRI INDRAJIT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS7107125B2Sep 12, 2006
Method and apparatus for monitoring the position of a semiconductor processing robot
APPLIED MATERIALS INC19 citations90
US7276447B1Oct 2, 2007
Plasma dielectric etch process including ex-situ backside polymer removal for low-dielectric constant material
APPLIED MATERIALS INC24 citations89
US7582167B2Sep 1, 2009
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
APPLIED MATERIALS INC15 citations83
US7279049B2Oct 9, 2007
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
APPLIED MATERIALS INC7 citations72
US12581837B2Mar 17, 2026
Oled pixel structures
APPLIED MATERIALS INC0 citations50