Inventor
BEDI SURINDER S
US10 patents
Patents
10 patentsUS6310755B1Oct 30, 2001
Electrostatic chuck having gas cavity and method
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US6538872B1Mar 25, 2003
Electrostatic chuck having heater and method
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US6490146B2Dec 3, 2002
Electrostatic chuck bonded to base with a bond layer and method
APPLIED MATERIALS INC88 citations97
US6094334AJul 25, 2000
Polymer chuck with heater and method of manufacture
APPLIED MATERIALS INC97 citations97
US6490144B1Dec 3, 2002
Support for supporting a substrate in a process chamber
APPLIED MATERIALS INC57 citations96
US6462928B1Oct 8, 2002
Electrostatic chuck having improved electrical connector and method
APPLIED MATERIALS INC65 citations96
US5986875ANov 16, 1999
Puncture resistant electrostatic chuck
APPLIED MATERIALS INC42 citations95
US5729423AMar 17, 1998
Puncture resistant electrostatic chuck
APPLIED MATERIALS INC57 citations95
US7582167B2Sep 1, 2009
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
APPLIED MATERIALS INC15 citations83
US7279049B2Oct 9, 2007
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
APPLIED MATERIALS INC7 citations72