Inventor
CHIEN TSUNG-CHIH
TW15 patents
⚠️ This page may combine multiple inventors who share the name “CHIEN TSUNG-CHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
12 patentsUS11774844B2Oct 3, 2023
Extreme ultraviolet mask and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11275301B2Mar 15, 2022
Extreme ultraviolet mask and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12181791B2Dec 31, 2024
Extreme ultraviolet mask and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12066765B2Aug 20, 2024
Operating method for preventing photomask particulate contamination
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11506985B2Nov 22, 2022
Semiconductor apparatus and method of operating the same for preventing photomask particulate contamination
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12216399B2Feb 4, 2025
Method of manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11940727B2Mar 26, 2024
Reticle enclosure for lithography systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11614683B2Mar 28, 2023
Reticle enclosure for lithography systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11415879B1Aug 16, 2022
Reticle enclosure for lithography systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US9911575B2Mar 6, 2018
Apparatus for charged particle lithography system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9633958B2Apr 25, 2017
Bonding pad surface damage reduction in a formation of digital pattern generator
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10824080B2Nov 3, 2020
Method to reduce native defect printability
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51