Inventor
AOYAMA KIMIHIRO
JP4 patents
Patents
4 patentsUS10301581B2May 28, 2019
Liquid composition for cleaning semiconductor device, method for cleaning semiconductor device, and method for fabricating semiconductor device
MITSUBISHI GAS CHEMICAL CO1 citations56
US11441109B2Sep 13, 2022
Cleaning solution for removing dry etching residue and method for manufacturing semiconductor substrate using same
MITSUBISHI GAS CHEMICAL CO0 citations55
US12129357B2Oct 29, 2024
Composition and method for producing cellulose fiber
MITSUBISHI GAS CHEMICAL CO0 citations52
US8956462B2Feb 17, 2015
Treatment liquid for inhibiting pattern collapse in microstructure and method of manufacturing microstructure using the same
MITSUBISHI GAS CHEMICAL CO0 citations48