Inventor

SEO HWAN-SEOK

KR8 patents

⚠️ This page may combine multiple inventors who share the name “SEO HWAN-SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE DONG-GUN

3 patents

US9025624B2May 5, 2015

Beam generator

LEE DONG-GUN3 citations61

US8637840B2Jan 28, 2014

EUV projection lens and optic system having the same

LEE DONG-GUN2 citations61

US8119309B2Feb 21, 2012

Reflective photomask and method of fabricating, reflective illumination system and method of process using the same

LEE DONG-GUN0 citations51

HYUNDAI ELECTRONICS IND

2 patents

US6184113B1Feb 6, 2001

Method of manufacturing a gate electrode in a semiconductor device

HYUNDAI ELECTRONICS IND9 citations72

US6190994B1Feb 20, 2001

Method for forming a tungsten upper electrode of a capacitor

HYUNDAI ELECTRONICS IND2 citations59

SAMSUNG ELECTRONICS CO LTD

2 patents

US9454074B2Sep 27, 2016

Reflective photomask blanks and reflective photomasks

SAMSUNG ELECTRONICS CO LTD2 citations60

US10444619B2Oct 15, 2019

Mask blank and phase shift mask using same

SAMSUNG ELECTRONICS CO LTD0 citations49

KIM SEONG-SUE

1 patent

US9645484B2May 9, 2017

Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the same

KIM SEONG-SUE2 citations66