Inventor

WAKATSUKI TAKAHIKO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “WAKATSUKI TAKAHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WAKATSUKI TAKAHIKO

2 patents

US8517035B2Aug 27, 2013

Processing apparatus and method

WAKATSUKI TAKAHIKO0 citations33

US8141567B2Mar 27, 2012

Apparatus and method for photoresist removal processing

WAKATSUKI TAKAHIKO0 citations33

FURUYA MASAAKI

1 patent

US9330948B2May 3, 2016

Heater unit, fan filter unit, and substrate processing apparatus

FURUYA MASAAKI0 citations47