Inventor

MASUHARA HIROFUMI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “MASUHARA HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCREEN HOLDINGS CO LTD

2 patents

US9640382B2May 2, 2017

Substrate processing apparatus and substrate processing method

SCREEN HOLDINGS CO LTD5 citations71

US9997378B2Jun 12, 2018

Substrate processing apparatus and substrate processing method

SCREEN HOLDINGS CO LTD0 citations50

DAINIPPON SCREEN MFG

1 patent

US9576808B2Feb 21, 2017

Substrate processing apparatus and substrate processing method

DAINIPPON SCREEN MFG1 citations50