Inventor
MIYAGI MASAHIRO
JP26 patents
⚠️ This page may combine multiple inventors who share the name “MIYAGI MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
7 patentsUS5975098ANov 2, 1999
Apparatus for and method of cleaning substrate
DAINIPPON SCREEN MFG171 citations98
US5763892AJun 9, 1998
Ultraviolet irradiator for substrate, substrate treatment system, and method of irradiating substrate with ultraviolet light
DAINIPPON SCREEN MFG51 citations88
US7169269B2Jan 30, 2007
Plating apparatus, plating cup and cathode ring
DAINIPPON SCREEN MFG11 citations82
US9852931B2Dec 26, 2017
Substrate processing apparatus
DAINIPPON SCREEN MFG1 citations63
US7958899B2Jun 14, 2011
Substrate cleaning apparatus and substrate cleaning method
DAINIPPON SCREEN MFG3 citations62
US9576808B2Feb 21, 2017
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG1 citations50
US9972515B2May 15, 2018
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG0 citations42
SCREEN HOLDINGS CO LTD
7 patentsUS9713822B2Jul 25, 2017
Substrate processing apparatus
SCREEN HOLDINGS CO LTD10 citations84
US10629459B2Apr 21, 2020
Substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations73
US10761422B2Sep 1, 2020
Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method
SCREEN HOLDINGS CO LTD3 citations71
US9640382B2May 2, 2017
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD5 citations71
US10468273B2Nov 5, 2019
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations52
US10133173B2Nov 20, 2018
Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method
SCREEN HOLDINGS CO LTD1 citations51
US9997378B2Jun 12, 2018
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
HITACHI LTD
6 patentsUS4597171AJul 1, 1986
Tube-enlarging press for use in heat exchanger fabrication
HITACHI LTD22 citations78
US4698904AOct 13, 1987
Apparatus for assembling fins and tubes for heat exchangers
HITACHI LTD21 citations77
US4593756AJun 10, 1986
Fin-and-tube type heat exchanger
HITACHI LTD19 citations72
US4898232AFeb 6, 1990
Heat exchanger and process for producing the same
HITACHI LTD10 citations71
US4566359AJan 28, 1986
Method of stacking fins of heat exchangers
HITACHI LTD19 citations69
US4142392AMar 6, 1979
Internally groove forming apparatus for heat exchanging pipes
HITACHI LTD5 citations61
MIYAGI MASAHIRO
4 patentsUS8883030B2Nov 11, 2014
Substrate processing apparatus and substrate processing method
MIYAGI MASAHIRO6 citations83
US8815048B2Aug 26, 2014
Substrate processing apparatus and substrate processing method
MIYAGI MASAHIRO2 citations61
US9142433B2Sep 22, 2015
Substrate processing apparatus and substrate processing method
MIYAGI MASAHIRO3 citations60
US9165798B2Oct 20, 2015
Substrate processing apparatus and substrate processing method
MIYAGI MASAHIRO1 citations51