Inventor
PETROV IGOR
IL19 patents
⚠️ This page may combine multiple inventors who share the name “PETROV IGOR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS ISRAEL LTD
13 patentsUS7067807B2Jun 27, 2006
Charged particle beam column and method of its operation
APPLIED MATERIALS ISRAEL LTD28 citations92
US7034297B2Apr 25, 2006
Method and system for use in the monitoring of samples with a charged particle beam
APPLIED MATERIALS ISRAEL LTD22 citations89
US7233008B1Jun 19, 2007
Multiple electrode lens arrangement and a method for inspecting an object
APPLIED MATERIALS ISRAEL LTD12 citations84
US6897442B2May 24, 2005
Objective lens arrangement for use in a charged particle beam column
APPLIED MATERIALS ISRAEL LTD17 citations83
US7223974B2May 29, 2007
Charged particle beam column and method for directing a charged particle beam
APPLIED MATERIALS ISRAEL LTD18 citations82
US6825475B2Nov 30, 2004
Deflection method and system for use in a charged particle beam column
APPLIED MATERIALS ISRAEL LTD13 citations82
US7170068B2Jan 30, 2007
Method and system for discharging a sample
APPLIED MATERIALS ISRAEL LTD7 citations71
US7112803B2Sep 26, 2006
Beam directing system and method for use in a charged particle beam column
APPLIED MATERIALS ISRAEL LTD8 citations71
US11626267B2Apr 11, 2023
Back-scatter electrons (BSE) imaging with a SEM in tilted mode using cap bias voltage
APPLIED MATERIALS ISRAEL LTD0 citations62
US7525091B2Apr 28, 2009
Charged particle beam system and a method for inspecting a sample
APPLIED MATERIALS ISRAEL LTD2 citations59
US7317606B2Jan 8, 2008
Particle trap for electrostatic chuck
APPLIED MATERIALS ISRAEL LTD4 citations57
US11264198B2Mar 1, 2022
Objective lens arrangement
APPLIED MATERIALS ISRAEL LTD0 citations56
US10074513B2Sep 11, 2018
Multi mode systems with retractable detectors
APPLIED MATERIALS ISRAEL LTD1 citations47
APPLIED MATERIALS INC
3 patentsUS6674075B2Jan 6, 2004
Charged particle beam apparatus and method for inspecting samples
APPLIED MATERIALS INC28 citations91
US6380546B1Apr 30, 2002
Focusing assembly and method for a charged particle beam column
APPLIED MATERIALS INC33 citations86
US7800062B2Sep 21, 2010
Method and system for the examination of specimen
APPLIED MATERIALS INC6 citations59