Inventor
LU KUO LIANG
TW31 patents
⚠️ This page may combine multiple inventors who share the name “LU KUO LIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
20 patentsUS6821810B1Nov 23, 2004
High transmittance overcoat for optimization of long focal length microlens arrays in semiconductor color imagers
TAIWAN SEMICONDUCTOR MFG166 citations98
US6171885B1Jan 9, 2001
High efficiency color filter process for semiconductor array imaging devices
TAIWAN SEMICONDUCTOR MFG125 citations98
US6586322B1Jul 1, 2003
Method of making a bump on a substrate using multiple photoresist layers
TAIWAN SEMICONDUCTOR MFG79 citations97
US6274917B1Aug 14, 2001
High efficiency color filter process for semiconductor array imaging devices
TAIWAN SEMICONDUCTOR MFG117 citations97
US6495813B1Dec 17, 2002
Multi-microlens design for semiconductor imaging devices to increase light collection efficiency in the color filter process
TAIWAN SEMICONDUCTOR MFG60 citations95
US6482331B2Nov 19, 2002
Method for preventing contamination in a plasma process chamber
TAIWAN SEMICONDUCTOR MFG562 citations95
US6531266B1Mar 11, 2003
Rework procedure for the microlens element of a CMOS image sensor
TAIWAN SEMICONDUCTOR MFG32 citations92
US7009772B2Mar 7, 2006
High transmittance overcoat for microlens arrays in semiconductor color imagers
TAIWAN SEMICONDUCTOR MFG33 citations91
US6590239B2Jul 8, 2003
Color filter image array optoelectronic microelectronic fabrication with a planarizing layer formed upon a concave surfaced color filter region
TAIWAN SEMICONDUCTOR MFG31 citations90
US6417022B1Jul 9, 2002
Method for making long focal length micro-lens for color filters
TAIWAN SEMICONDUCTOR MFG44 citations90
US5951743ASep 14, 1999
Method and apparatus for feeding exhaust gases to a wet scrubber
TAIWAN SEMICONDUCTOR MFG29 citations89
US5820689AOct 13, 1998
Wet chemical treatment system and method for cleaning such system
TAIWAN SEMICONDUCTOR MFG38 citations89
US5868898AFeb 9, 1999
Fluid dispensing device for wet chemical process tank and method of using
TAIWAN SEMICONDUCTOR MFG20 citations86
US6878642B1Apr 12, 2005
Method to improve passivation openings by reflow of photoresist to eliminate tape residue
TAIWAN SEMICONDUCTOR MFG9 citations74
US6623912B1Sep 23, 2003
Method to form the ring shape contact to cathode on wafer edge for electroplating in the bump process when using the negative type dry film photoresist
TAIWAN SEMICONDUCTOR MFG7 citations74
US6926818B1Aug 9, 2005
Method to enhance the adhesion between dry film and seed metal
TAIWAN SEMICONDUCTOR MFG7 citations73
US6796315B2Sep 28, 2004
Method to remove particulate contamination from a solution bath
TAIWAN SEMICONDUCTOR MFG10 citations66
US6468704B1Oct 22, 2002
Method for improved photomask alignment after epitaxial process through 90° orientation change
TAIWAN SEMICONDUCTOR MFG6 citations62
US6671396B1Dec 30, 2003
Method to monitor stepper lens quality in color filter process
TAIWAN SEMICONDUCTOR MFG6 citations56
US7730898B2Jun 8, 2010
Semiconductor wafer lifter
TAIWAN SEMICONDUCTOR MFG3 citations49
TAIWAN SEMICONDUCTOR MFG CO LTD
11 patentsUS10569520B2Feb 25, 2020
Wafer debonding system and method
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US10155369B2Dec 18, 2018
Wafer debonding system and method
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US11031369B2Jun 8, 2021
Apparatus for bond wave propagation control
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10497667B2Dec 3, 2019
Apparatus for bond wave propagation control
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10889097B2Jan 12, 2021
Wafer debonding system and method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12503769B2Dec 23, 2025
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11742321B2Aug 29, 2023
Apparatus for bond wave propagation control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12243719B2Mar 4, 2025
Gas distribution ring for process chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12211737B2Jan 28, 2025
Cleaning chamber for metal oxide removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10056275B2Aug 21, 2018
Immersion de-taping
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45
US9613845B2Apr 4, 2017
Immersion de-taping
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45