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Inventor
LOQUET YANNICK
FR
2 patents
Patents
2 patents
US9214429B2
Dec 15, 2015
Trench interconnect having reduced fringe capacitance
ST MICROELECTRONICS INC
5 citations
71
US10546743B2
Jan 28, 2020
Advanced interconnect with air gap
ST MICROELECTRONICS INC
0 citations
51