Inventor
TSANG VINCENT W
US9 patents
⚠️ This page may combine multiple inventors who share the name “TSANG VINCENT W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BROOKS AUTOMATION INC
6 patentsUS11235935B2Feb 1, 2022
Substrate transport apparatus
BROOKS AUTOMATION INC3 citations71
US10651067B2May 12, 2020
Method and apparatus for substrate transport apparatus position compensation
BROOKS AUTOMATION INC2 citations71
US11972965B2Apr 30, 2024
Method and apparatus for substrate transport apparatus position compensation
BROOKS AUTOMATION INC0 citations61
US11251059B2Feb 15, 2022
Method and apparatus for substrate transport apparatus position compensation
BROOKS AUTOMATION INC0 citations61
US11192239B2Dec 7, 2021
Substrate processing apparatus
BROOKS AUTOMATION INC1 citations61
US11270904B2Mar 8, 2022
Substrate processing apparatus
BROOKS AUTOMATION INC1 citations59