P

Inventor

CARTER DANIEL

US47 patents
⚠️ This page may combine multiple inventors who share the name “CARTER DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED ENERGY IND INC

25 patents
US10607813B2Mar 31, 2020

Synchronized pulsing of plasma processing source and substrate bias

ADVANCED ENERGY IND INC104 citations99
US10269540B1Apr 23, 2019

Impedance matching system and method of operating the same

ADVANCED ENERGY IND INC154 citations99
US11011349B2May 18, 2021

System, method, and apparatus for controlling ion energy distribution in plasma processing systems

ADVANCED ENERGY IND INC49 citations98
US10896807B2Jan 19, 2021

Synchronization between an excitation source and a substrate bias supply

ADVANCED ENERGY IND INC58 citations98
US10707055B2Jul 7, 2020

Spatial and temporal control of ion bias voltage for plasma processing

ADVANCED ENERGY IND INC55 citations98
US8742669B2Jun 3, 2014

Passive power distribution for multiple electrode inductive plasma source

ADVANCED ENERGY IND INC102 citations98
US9105447B2Aug 11, 2015

Wide dynamic range ion energy bias control; fast ion energy switching; ion energy control and a pulsed bias supply; and a virtual front panel

ADVANCED ENERGY IND INC100 citations96
US11437221B2Sep 6, 2022

Spatial monitoring and control of plasma processing environments

ADVANCED ENERGY IND INC16 citations94
US11282677B2Mar 22, 2022

Spatial monitoring and control of plasma processing environments

ADVANCED ENERGY IND INC15 citations94
US11189454B2Nov 30, 2021

Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system

ADVANCED ENERGY IND INC20 citations94
US9524854B2Dec 20, 2016

Electrostatic remote plasma source system and method

ADVANCED ENERGY IND INC28 citations93
US9142388B2Sep 22, 2015

Capacitively coupled remote plasma source

ADVANCED ENERGY IND INC25 citations92
US10224186B2Mar 5, 2019

Plasma source device and methods

ADVANCED ENERGY IND INC25 citations88
US11615941B2Mar 28, 2023

System, method, and apparatus for controlling ion energy distribution in plasma processing systems

ADVANCED ENERGY IND INC14 citations86
US11978611B2May 7, 2024

Apparatus with switches to produce a waveform

ADVANCED ENERGY IND INC6 citations85
US12142460B2Nov 12, 2024

Control of plasma sheath with bias supplies

ADVANCED ENERGY IND INC3 citations75
US12125674B2Oct 22, 2024

Surface charge and power feedback and control using a switch mode bias system

ADVANCED ENERGY IND INC5 citations75
US12159767B2Dec 3, 2024

Spatial control of plasma processing environments

ADVANCED ENERGY IND INC2 citations73
US12154759B2Nov 26, 2024

Apparatus to control a waveform

ADVANCED ENERGY IND INC2 citations73
US12142452B2Nov 12, 2024

Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system

ADVANCED ENERGY IND INC1 citations73
US11842884B2Dec 12, 2023

Spatial monitoring and control of plasma processing environments

ADVANCED ENERGY IND INC1 citations73
US11610761B2Mar 21, 2023

Synchronization between an excitation source and a substrate bias supply

ADVANCED ENERGY IND INC3 citations73
US12354836B2Jul 8, 2025

System, method, and apparatus for controlling ion energy distribution in plasma processing systems

ADVANCED ENERGY IND INC0 citations63
US12567572B2Mar 3, 2026

Plasma behaviors predicted by current measurements during asymmetric bias waveform application

ADVANCED ENERGY IND INC0 citations62
US12505980B2Dec 23, 2025

Apparatus to produce a waveform

ADVANCED ENERGY IND INC0 citations62

HOFFMAN DANIEL J

5 patents

CARTER DANIEL

4 patents

BROUK VICTOR

2 patents

NORTEL NETWORKS LTD

2 patents

TECHTRONIC FLOOR CARE TECHNOLOGIES LTD

2 patents

ROBBIN GREGORY S

1 patent

HIEB LARRY

1 patent

SANDEN VENDO AMERICA INC

1 patent

AC MACAO COMMERCIAL OFFSHORE LTD

1 patent

AXON DX LLC

1 patent

GEN ELECTRIC

1 patent

BIASLY LLC

1 patent