Inventor
ITAKURA IKUO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “ITAKURA IKUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOTO LTD
8 patentsUS7468880B2Dec 23, 2008
Electrostatic chuck
TOTO LTD9 citations78
US10497600B2Dec 3, 2019
Electrostatic chuck
TOTO LTD4 citations71
US7672111B2Mar 2, 2010
Electrostatic chuck and method for manufacturing same
TOTO LTD6 citations69
US11018039B2May 25, 2021
Electrostatic chuck which reduces arc discharge
TOTO LTD0 citations50
US11410868B2Aug 9, 2022
Electrostatic chuck
TOTO LTD0 citations49
US10923383B2Feb 16, 2021
Electrostatic chuck
TOTO LTD0 citations47
US12597872B2Apr 7, 2026
Electrostatic chuck and method of manufacturing the same
TOTO LTD0 citations46
US7760484B2Jul 20, 2010
Electrostatic chuck
TOTO LTD1 citations41