Inventor
ORAM DAVID CRAIG
US2 patents
Patents
2 patentsUS11139216B2Oct 5, 2021
System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer
KLA TENCOR CORP0 citations56
US10679909B2Jun 9, 2020
System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated wafer
KLA TENCOR CORP0 citations46