Inventor
MATHUR ABHINAV
US3 patents
⚠️ This page may combine multiple inventors who share the name “MATHUR ABHINAV”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
2 patentsUS11139216B2Oct 5, 2021
System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer
KLA TENCOR CORP0 citations56
US10679909B2Jun 9, 2020
System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated wafer
KLA TENCOR CORP0 citations46