Inventor
WU KENONG
US33 patents
⚠️ This page may combine multiple inventors who share the name “WU KENONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
20 patentsUS9092846B2Jul 28, 2015
Detecting defects on a wafer using defect-specific and multi-channel information
KLA TENCOR CORP30 citations94
US9846930B2Dec 19, 2017
Detecting defects on a wafer using defect-specific and multi-channel information
KLA TENCOR CORP5 citations84
US10127652B2Nov 13, 2018
Defect detection and classification based on attributes determined from a standard reference image
KLA TENCOR CORP9 citations83
US9171364B2Oct 27, 2015
Wafer inspection using free-form care areas
KLA TENCOR CORP16 citations82
US10365232B2Jul 30, 2019
High accuracy of relative defect locations for repeater analysis
KLA TENCOR CORP9 citations81
US9189844B2Nov 17, 2015
Detecting defects on a wafer using defect-specific information
KLA TENCOR CORP15 citations81
US9518934B2Dec 13, 2016
Wafer defect discovery
KLA TENCOR CORP12 citations78
US10572991B2Feb 25, 2020
System and method for aligning semiconductor device reference images and test images
KLA TENCOR CORP3 citations73
US9766186B2Sep 19, 2017
Array mode repeater detection
KLA TENCOR CORP3 citations73
US9552636B2Jan 24, 2017
Detecting defects on a wafer using defect-specific and multi-channel information
KLA TENCOR CORP3 citations73
US10395359B2Aug 27, 2019
Adaptive local threshold and color filtering
KLA TENCOR CORP2 citations72
US9727047B2Aug 8, 2017
Defect detection using structural information
KLA TENCOR CORP3 citations72
US9704234B2Jul 11, 2017
Adaptive local threshold and color filtering
KLA TENCOR CORP2 citations72
US9766187B2Sep 19, 2017
Repeater detection
KLA TENCOR CORP2 citations70
US11067516B2Jul 20, 2021
High accuracy of relative defect locations for repeater analysis
KLA TENCOR CORP1 citations60
US11139216B2Oct 5, 2021
System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer
KLA TENCOR CORP0 citations56
US9721337B2Aug 1, 2017
Detecting defects on a wafer using defect-specific information
KLA TENCOR CORP0 citations49
US10679909B2Jun 9, 2020
System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated wafer
KLA TENCOR CORP0 citations46
US10339262B2Jul 2, 2019
System and method for defining care areas in repeating structures of design data
KLA TENCOR CORP0 citations40
US10387601B2Aug 20, 2019
Methods to store dynamic layer content inside a design file
KLA TENCOR CORP0 citations33
KLA TENCOR TECH CORP
4 patentsUS7729529B2Jun 1, 2010
Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle
KLA TENCOR TECH CORP39 citations90
US7570800B2Aug 4, 2009
Methods and systems for binning defects detected on a specimen
KLA TENCOR TECH CORP29 citations90
US7359544B2Apr 15, 2008
Automatic supervised classifier setup tool for semiconductor defects
KLA TENCOR TECH CORP46 citations89
US7142992B1Nov 28, 2006
Flexible hybrid defect classification for semiconductor manufacturing
KLA TENCOR TECH CORP28 citations89