Inventor
WILDENBERG JOCHEM SEBASTIAAN
NL24 patents
Patents
24 patentsUS10274834B2Apr 30, 2019
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV15 citations93
US9946165B2Apr 17, 2018
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV19 citations93
US9811006B2Nov 7, 2017
Method of determining a measurement subset of metrology points on a substrate, associated apparatus and computer program
ASML NETHERLANDS BV9 citations84
US10642162B2May 5, 2020
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV8 citations83
US11940740B2Mar 26, 2024
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV2 citations72
US10802408B2Oct 13, 2020
Method for optimization of a lithographic process
ASML NETHERLANDS BV3 citations71
US11170072B2Nov 9, 2021
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV2 citations70
US10816904B2Oct 27, 2020
Method for determining contribution to a fingerprint
ASML NETHERLANDS BV2 citations70
US11294289B2Apr 5, 2022
Selecting a set of locations associated with a measurement or feature on a substrate
ASML NETHERLANDS BV2 citations68
US12287584B2Apr 29, 2025
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV0 citations62
US11385550B2Jul 12, 2022
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV0 citations62
US11480884B2Oct 25, 2022
Method for optimization of a lithographic process
ASML NETHERLANDS BV0 citations60
US11442367B2Sep 13, 2022
Optimizing a sequence of processes for manufacturing of product units
ASML NETHERLANDS BV0 citations59
US11378891B2Jul 5, 2022
Method for determining contribution to a fingerprint
ASML NETHERLANDS BV1 citations59
US11106141B2Aug 31, 2021
Optimizing a sequence of processes for manufacturing of product units
ASML NETHERLANDS BV1 citations59
US11681231B2Jun 20, 2023
Selecting a set of locations associated with a measurement or feature on a substrate
ASML NETHERLANDS BV0 citations57
US11669017B2Jun 6, 2023
Method for controlling a manufacturing apparatus and associated apparatuses
ASML NETHERLANDS BV1 citations57
US11796920B2Oct 24, 2023
Method for controlling a manufacturing process and associated apparatuses
ASML NETHERLANDS BV0 citations56
US11435673B2Sep 6, 2022
Method of determining a set of metrology points on a substrate, associated apparatus and computer program
ASML NETHERLANDS BV0 citations56
US11327406B2May 10, 2022
Estimating a parameter of a substrate
ASML NETHERLANDS BV0 citations55
US10928737B2Feb 23, 2021
Method for characterizing distortions in a lithographic process, lithographic apparatus, lithographic cell and computer program
ASML NETHERLANDS BV0 citations51
US10809631B2Oct 20, 2020
Method of monitoring and device manufacturing method
ASML NETHERLANDS BV0 citations51
US11300887B2Apr 12, 2022
Method to change an etch parameter
ASML NETHERLANDS BV0 citations49
US10725372B2Jul 28, 2020
Method and apparatus for reticle optimization
ASML NETHERLANDS BV0 citations49