Inventor
WERKMAN ROY
NL27 patents
Patents
27 patentsUS7042552B1May 9, 2006
Alignment strategy optimization method
ASML NETHERLANDS BV33 citations91
US7433038B2Oct 7, 2008
Alignment of substrates for bonding
ASML NETHERLANDS BV11 citations84
US7415319B2Aug 19, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV17 citations84
US7468795B2Dec 23, 2008
Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the same
ASML NETHERLANDS BV9 citations76
US11994845B2May 28, 2024
Determining a correction to a process
ASML NETHERLANDS BV2 citations71
US10816904B2Oct 27, 2020
Method for determining contribution to a fingerprint
ASML NETHERLANDS BV2 citations70
US10627729B2Apr 21, 2020
Calibration method for a lithographic apparatus
ASML NETHERLANDS BV4 citations68
US7969577B2Jun 28, 2011
Inspection apparatus, an apparatus for projecting an image and a method of measuring a property of a substrate
ASML NETHERLANDS BV5 citations63
US12124179B2Oct 22, 2024
Method of wafer alignment using at resolution metrology on product features
ASML NETHERLANDS BV0 citations61
US12493285B2Dec 9, 2025
Determining a correction to a process
ASML NETHERLANDS BV0 citations60
US11086305B2Aug 10, 2021
Determining a correction to a process
ASML NETHERLANDS BV0 citations60
US11442367B2Sep 13, 2022
Optimizing a sequence of processes for manufacturing of product units
ASML NETHERLANDS BV0 citations59
US11378891B2Jul 5, 2022
Method for determining contribution to a fingerprint
ASML NETHERLANDS BV1 citations59
US11106141B2Aug 31, 2021
Optimizing a sequence of processes for manufacturing of product units
ASML NETHERLANDS BV1 citations59
US11754931B2Sep 12, 2023
Method for determining corrections for lithographic apparatus
ASML NETHERLANDS BV0 citations58
US11669017B2Jun 6, 2023
Method for controlling a manufacturing apparatus and associated apparatuses
ASML NETHERLANDS BV1 citations57
US10884345B2Jan 5, 2021
Calibration method for a lithographic apparatus
ASML NETHERLANDS BV0 citations57
US12366809B2Jul 22, 2025
Methods and apparatus for controlling a lithographic process
ASML NETHERLANDS BV0 citations56
US11435673B2Sep 6, 2022
Method of determining a set of metrology points on a substrate, associated apparatus and computer program
ASML NETHERLANDS BV0 citations56
US11327406B2May 10, 2022
Estimating a parameter of a substrate
ASML NETHERLANDS BV0 citations55
US10928737B2Feb 23, 2021
Method for characterizing distortions in a lithographic process, lithographic apparatus, lithographic cell and computer program
ASML NETHERLANDS BV0 citations51
US12591177B2Mar 31, 2026
Method for obtaining training data for training a model of a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations49
US11372338B2Jun 28, 2022
Method for evaluating control strategies in a semiconductor manufacturing process
ASML NETHERLANDS BV1 citations49
US11300887B2Apr 12, 2022
Method to change an etch parameter
ASML NETHERLANDS BV0 citations49
US10725372B2Jul 28, 2020
Method and apparatus for reticle optimization
ASML NETHERLANDS BV0 citations49
US12578653B2Mar 17, 2026
Method for determining a sampling scheme, a semiconductor substrate measurement apparatus, a lithographic apparatus
ASML NETHERLANDS BV0 citations45
US12276919B2Apr 15, 2025
Method for controlling a semiconductor manufacturing process
ASML NETHERLANDS BV0 citations44