Inventor
GRUENBERGER ROBERT
DE9 patents
⚠️ This page may combine multiple inventors who share the name “GRUENBERGER ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
7 patentsUS7889030B2Feb 15, 2011
Passive temperature compensation of silicon MEMS devices
INFINEON TECHNOLOGIES AG16 citations83
US10899604B2Jan 26, 2021
Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel package
INFINEON TECHNOLOGIES AG3 citations71
US11505450B2Nov 22, 2022
Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel package
INFINEON TECHNOLOGIES AG0 citations61
US11247895B2Feb 15, 2022
Segmented stress decoupling via frontside trenching
INFINEON TECHNOLOGIES AG0 citations60
US8993394B2Mar 31, 2015
Micro-electromechanical system devices
INFINEON TECHNOLOGIES AG0 citations51
US10807862B1Oct 20, 2020
Segmented stress decoupling via frontside trenching
INFINEON TECHNOLOGIES AG0 citations49
US10843916B2Nov 24, 2020
Mechanical stress decoupling for microelectromechanical systems (MEMS) elements with gel-filling
INFINEON TECHNOLOGIES AG0 citations39