Inventor
WANG MARK S
US12 patents
⚠️ This page may combine multiple inventors who share the name “WANG MARK S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OPLINK COMMUNICATIONS INC
3 patentsKLA CORP
3 patentsKLA TENCOR CORP
3 patentsUS9423357B2Aug 23, 2016
Oblique illuminator for inspecting manufactured substrates
KLA TENCOR CORP0 citations49
US11668655B2Jun 6, 2023
Multimode defect classification in semiconductor inspection
KLA TENCOR CORP0 citations44
US9927371B2Mar 27, 2018
Confocal line inspection optical system
KLA TENCOR CORP0 citations33