Inventor
THOMPSON MICHAEL O
US27 patents
⚠️ This page may combine multiple inventors who share the name “THOMPSON MICHAEL O”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULTRATECH STEPPER INC
8 patentsUS6747245B2Jun 8, 2004
Laser scanning apparatus and methods for thermal processing
ULTRATECH STEPPER INC190 citations99
US6635588B1Oct 21, 2003
Method for laser thermal processing using thermally induced reflectivity switch
ULTRATECH STEPPER INC287 citations99
US6479821B1Nov 12, 2002
Thermally induced phase switch for laser thermal processing
ULTRATECH STEPPER INC289 citations99
US6380044B1Apr 30, 2002
High-speed semiconductor transistor and selective absorption process forming same
ULTRATECH STEPPER INC95 citations98
US6645838B1Nov 11, 2003
Selective absorption process for forming an activated doped region in a semiconductor
ULTRATECH STEPPER INC60 citations96
US6495390B2Dec 17, 2002
Thermally induced reflectivity switch for laser thermal processing
ULTRATECH STEPPER INC38 citations96
US6383956B2May 7, 2002
Method of forming thermally induced reflectivity switch for laser thermal processing
ULTRATECH STEPPER INC61 citations96
US6303476B1Oct 16, 2001
Thermally induced reflectivity switch for laser thermal processing
ULTRATECH STEPPER INC62 citations96
ULTRATECH INC
7 patentsUS7157660B2Jan 2, 2007
Laser scanning apparatus and methods for thermal processing
ULTRATECH INC30 citations93
US7145104B2Dec 5, 2006
Silicon layer for uniformizing temperature during photo-annealing
ULTRATECH INC24 citations93
US7148159B2Dec 12, 2006
Laser thermal annealing of lightly doped silicon substrates
ULTRATECH INC31 citations92
US7879741B2Feb 1, 2011
Laser thermal annealing of lightly doped silicon substrates
ULTRATECH INC10 citations84
US7176405B2Feb 13, 2007
Heat shield for thermal processing
ULTRATECH INC17 citations84
US7731798B2Jun 8, 2010
Heated chuck for laser thermal processing
ULTRATECH INC8 citations81
US7326877B2Feb 5, 2008
Laser thermal processing chuck with a thermal compensating heater module
ULTRATECH INC0 citations49
THIN FILM ELECTRONICS ASA
4 patentsUS6787825B1Sep 7, 2004
Data storage and processing apparatus, and method for fabricating the same
THIN FILM ELECTRONICS ASA90 citations98
US6950330B2Sep 27, 2005
Addressing of memory matrix
THIN FILM ELECTRONICS ASA16 citations92
US6804138B2Oct 12, 2004
Addressing of memory matrix
THIN FILM ELECTRONICS ASA20 citations92
US7020005B2Mar 28, 2006
Non-switching pre- and post- disturb compensational pulses
THIN FILM ELECTRONICS ASA4 citations60