Inventor
BANGAR MANGESH ASHOK
US6 patents
Patents
6 patentsUS11429026B2Aug 30, 2022
Lithography process window enhancement for photoresist patterning
APPLIED MATERIALS INC2 citations72
US11914299B2Feb 27, 2024
Lithography process window enhancement for photoresist patterning
APPLIED MATERIALS INC0 citations61
US11880137B2Jan 23, 2024
Film structure for electric field guided photoresist patterning process
APPLIED MATERIALS INC0 citations60
US12204246B2Jan 21, 2025
Metal oxide resist patterning with electrical field guided post-exposure bake
APPLIED MATERIALS INC0 citations50
US12085858B2Sep 10, 2024
Photoresist patterning process
APPLIED MATERIALS INC0 citations50
US11609505B2Mar 21, 2023
Apparatus and methods for verification and re-use of process fluids
APPLIED MATERIALS INC0 citations46