Inventor
WELCH STEVEN HILOONG
US6 patents
Patents
6 patentsUS11049537B2Jun 29, 2021
Additive patterning of semiconductor film stacks
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US11798606B2Oct 24, 2023
Additive patterning of semiconductor film stacks
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US11650506B2May 16, 2023
Film structure for electric field guided photoresist patterning process
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US11880137B2Jan 23, 2024
Film structure for electric field guided photoresist patterning process
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US12204246B2Jan 21, 2025
Metal oxide resist patterning with electrical field guided post-exposure bake
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US12085858B2Sep 10, 2024
Photoresist patterning process
APPLIED MATERIALS INC0 citations50